New methods for estimating deformations in measurement of the linear parameters of precision parts in the nanometric range

Kainer, G. B.

NIIizmereniya, Moscow, Russia

Translated from Izmeritel'naya Tekhnika, No. 12, pp. 6–10, December, 2008.

Received: 19 May 2008.

Measurement Techniques 51(12):p 1262-1268, December 2008.

New measurement methods and measurement instrumentation with resolution of 0.1 nm are developed that make it possible to achieve objective reliable estimation of the influence that deformations exert on the accuracy with which precision parts are monitored in the nanometric range and to determine the parameters of these deformations.